Title:
メカニカルシールアセンブリ付き回転ユニオン
Document Type and Number:
Japanese Patent JP7154406
Kind Code:
B2
Abstract:
Disclosed is a rotary union including an inner shaft, wherein the inner shaft is rotatable and includes an internal channel operable to deliver a cryogenic fluid to a platen. The rotary union may further include a rotary union shaft surrounding the inner shaft, and a seal assembly coupled to the rotary union shaft. The seal assembly may include a support, a metal bellows extending around an exterior of the support, and a seal support coupled to the metal bellows, wherein the seal support extends around the support. The seal assembly may further include a non-rotating seal component seated in the seal support, and a rotating seal component in abutment with the non-rotating seal component to create a mechanical seal therebetween.
Inventors:
Mitchell, Robert J.
Colom, Guillermo
Colom, Guillermo
Application Number:
JP2021518171A
Publication Date:
October 17, 2022
Filing Date:
September 18, 2019
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
F16J3/04; F16J15/34; F16J15/52; H01L21/304
Domestic Patent References:
| JP11336970A | ||||
| JP4097168U |
Foreign References:
| WO2017221631A1 |
Attorney, Agent or Firm:
Sonoda & Kobayashi Patent Attorneys Corporation
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