To form a highly reliable liquid metal relay by micro-machine technology, and to materialize the relay having good high frequency characteristics and a low resistance value by providing a through electrode.
The relay formed to switch the on-off state between a plurality of electrodes with a liquid metal includes: a passage formed by bonding a first substrate and a second substrate together; a liquid chamber formed in the middle of the passage; a plurality of the electrodes arranged in the liquid chamber; a first gas chamber and a second gas chamber disposed so as to be in communication with both ends of the passage; a gas filled in these first and second gas chambers; a heating means to heat the gas; the liquid metal filled in the liquid chamber; the through electrode led to the outside of the first substrate from a plurality of the electrodes; and the heating means. Thus, the relay having good high frequency characteristics and a low resistance value is materialized.
NORO MAKOTO
SUZUKI YOSHITAKA
