Title:
PROCESS GAS SUPPLY UNIT
Document Type and Number:
Japanese Patent JP2000018407
Kind Code:
A
Abstract:
To provide a compact, short and cost-reduced mass flow controller system.
An inlet-switching valve is an air-operated proportional valve 15 with a cutoff function. This valve has control valves 35 and 36 to control air pressure supplied to the inlet switching valve and a control means 32 for control valves 35 and 36 to set pressure at an outlet port 21 of the inlet- switching valve to specified values based on output of a pressure sensor 13.
Inventors:
OKUMURA KATSUYA
MIKATA YUICHI
HATTORI KEI
SUDO YOSHIHISA
ITO MINORU
NITTA SHINICHI
MIKATA YUICHI
HATTORI KEI
SUDO YOSHIHISA
ITO MINORU
NITTA SHINICHI
Application Number:
JP18706698A
Publication Date:
January 18, 2000
Filing Date:
July 02, 1998
Export Citation:
Assignee:
CKD CORP
TOSHIBA CORP
TOSHIBA CORP
International Classes:
F16K21/00; F16K31/06; (IPC1-7): F16K21/00; F16K31/06
Attorney, Agent or Firm:
Takashi Tomizawa (2 outside)