Title:
PRESSURE ADJUSTMENT VACUUM VALVE
Document Type and Number:
Japanese Patent JP2022061937
Kind Code:
A
Abstract:
To provide a pressure adjustment vacuum valve capable of reducing vibration due to driving of a valve body.SOLUTION: A pressure adjustment vacuum valve comprises: a valve body; a drive unit 71 that drives the valve body to open and close; a control unit 72 as an opening control unit that controls the opening degree of the valve body driven by the drive unit 71; and a control unit 72 as a setting unit that sets drive parameters of valve body drive from a first opening at which the drive starts to a second opening at which the drive stops so as to reduce valve body drive power.SELECTED DRAWING: Figure 1
Inventors:
NAKAMURA MASAYA
OZAKI JUNICHIRO
OZAKI JUNICHIRO
Application Number:
JP2021064812A
Publication Date:
April 19, 2022
Filing Date:
April 06, 2021
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
F16K51/02
Attorney, Agent or Firm:
Yamashita
Fuyuki Nagai
Fuyuki Nagai
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