Title:
研磨装置及びこれを含んだ研削・研磨機
Document Type and Number:
Japanese Patent JP4594545
Kind Code:
B2
Inventors:
Yutaka Koma
Application Number:
JP2001093398A
Publication Date:
December 08, 2010
Filing Date:
March 28, 2001
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B29/00; B24B37/24; B24D13/12; B24D13/14; H01L21/304
Domestic Patent References:
| JP2000343440A | ||||
| JP2000254857A | ||||
| JP2145957U | ||||
| JP10249711A | ||||
| JP56056382A |
Attorney, Agent or Firm:
Naozumi Ono