Title:
粒子発生の低い耐プラズマ弗素アルミナセラミック材料及び製造方法
Document Type and Number:
Japanese Patent JP5127196
Kind Code:
B2
Abstract:
A plasma fluorine resistant polycrystalline alumina ceramic material is produced by forming a green body including alumina and a binder, and sintering the green body for a time from about 8 to 12 hours. The area % of unsintered particles in the polycrystalline alumina ceramic material does not exceed 0.1 area %, resulting in reduced emission of particles from the material after exposure to plasma fluorine.
Inventors:
Anand Gupta
Tirunelberg Es. Ravi
Tirunelberg Es. Ravi
Application Number:
JP2006287861A
Publication Date:
January 23, 2013
Filing Date:
October 23, 2006
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
C04B35/111; C04B35/10; F16J12/00; C23C16/44; H01L21/205; H01L21/3065
Domestic Patent References:
| JP1502426A |
Attorney, Agent or Firm:
Sonoda Yoshitaka
Kobayashi Yoshinori
Kobayashi Yoshinori