Title:
PILOT TYPE 2-PORT VACUUM VALVE
Document Type and Number:
Japanese Patent JP3442714
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a pilot type 2-port vacuum valve stably setting inside a vacuum chamber to a desired pressure without stirring up particles by a simple constitution and a simple operation.
SOLUTION: This pilot type 2-port vacuum valve is provided with a main valve 24 fully opening/closing a main channel B connecting a first and second ports 3 and 4, a sub-valve 9 restrictively opening/closing a sub-channel A having an opening area smaller than the main channel B, a main valve drive part connected to the main valve 24 via a first shaft 6 and driving the main valve 24 by a hydraulic pressure, first elastic members 10 and 14 energizing the first shaft 6 in the directing of closing the main valve 24, a sub-valve drive part connected to the sub-valve 9 via a second shaft 7 and driving the sub-valve 9 by the hydraulic pressure, a second elastic member 15 energizing the second shaft 7 in the direction of closing the sub-valve 9, and an operation port 35 introducing the pressure fluid to the main pressure operation chamber 47a and sub-pressure operation chamber 48a.
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Inventors:
Masakazu Furudate
Kajitani Masao
Kajitani Masao
Application Number:
JP2000078286A
Publication Date:
September 02, 2003
Filing Date:
March 21, 2000
Export Citation:
Assignee:
SMC Corporation
International Classes:
F16K1/44; F16K31/122; F16K37/00; F16K39/02; F16K51/02; H01L21/00; (IPC1-7): F16K31/122; F16K1/44; F16K37/00; F16K51/02
Domestic Patent References:
| JP9137879A |
Attorney, Agent or Firm:
Hiroshi Hayashi (2 outside)
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