Title:
フォトマスク
Document Type and Number:
Japanese Patent JP3984627
Kind Code:
B2
Inventors:
Akio Misaka
Application Number:
JP2005348362A
Publication Date:
October 03, 2007
Filing Date:
December 01, 2005
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
G03F1/29; G03F1/32; G03F1/68; H01L21/027
Domestic Patent References:
| JP9269590A | ||||
| JP10048806A | ||||
| JP2000019710A | ||||
| JP2000267255A |
Foreign References:
| WO2003062923A1 | ||||
| WO2002091079A1 |
Attorney, Agent or Firm:
Hiroshi Maeda
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Seki Kei
Yasuya Sugiura
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Seki Kei
Yasuya Sugiura