Title:
Particle Charging device
Document Type and Number:
Japanese Patent JP6210159
Kind Code:
B2
Abstract:
A particle charger is provided with: a filter (28) partitioning the inside of a housing (20) into a first space (29) and second space (30); a particle introducer (22) for introducing a particle into the first space; a gas ion supplier (10) for supplying the first space with a gas ion; a potential gradient creator (26, 27, 31) for creating a potential difference within the housing so as to make the gas ion and a charged particle resulting from a contact of the aforementioned particle with the gas ion move toward the second space; an AC voltage supplier (32, 33) for applying AC voltages having a phase difference to the neighboring electrodes (28a, b) included in the filter; a controller (35) for performing a control for applying, to the plurality of electrodes, predetermined voltages so as to allow the charged particle to pass through a gap between the electrodes while trapping the gas ion by the electrodes; and a charged particle extractor (23, 25, 34) for extracting the charged particle admitted to the second space to the outside of the housing. By this configuration, the occurrence frequency of the multi-charging is suppressed.
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Inventors:
Yoshihiro Ueno
Hiroshi Seki
Hiroshi Okuda
Hiroshi Seki
Hiroshi Okuda
Application Number:
JP2016539790A
Publication Date:
October 11, 2017
Filing Date:
August 08, 2014
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
B03C7/02; G01N15/02; G01N15/06; G01N27/60
Domestic Patent References:
| JP2008070281A | ||||
| JP2005230651A | ||||
| JP2007305498A | ||||
| JP4905040B2 | ||||
| JP62053753A | ||||
| JP2003326192A |
Foreign References:
| US20100001184 | ||||
| US6003389 |
Attorney, Agent or Firm:
Kyoto International Patent Office