Title:
【発明の名称】パタ-ン形成方法
Document Type and Number:
Japanese Patent JP2537883
Kind Code:
B2
Inventors:
KAWATSUKI YOSHIHIRO
UETSUKI MASAO
IGUCHI TSUTOMU
TAKAHASHI AKIJI
TOKUHARA TOSHIAKI
BABA KAZUO
UETSUKI MASAO
IGUCHI TSUTOMU
TAKAHASHI AKIJI
TOKUHARA TOSHIAKI
BABA KAZUO
Application Number:
JP16500587A
Publication Date:
September 25, 1996
Filing Date:
June 30, 1987
Export Citation:
Assignee:
KURARAY CO
International Classes:
G03F7/00; G02B5/18; G02B6/13; G03C5/00; G03F7/027; G03F7/26; G03F7/30; G03F7/36; G03F7/38; (IPC1-7): G03F7/38; G02B5/18; G03F7/36
Domestic Patent References:
| JP4995702A | ||||
| JP6188262A | ||||
| JP5416203A | ||||
| JP59214851A | ||||
| JP60166946A | ||||
| JP6295525A | ||||
| JP6295526A |