Title:
非接触支持装置
Document Type and Number:
Japanese Patent JP4583882
Kind Code:
B2
Inventors:
Masa Ito
Niwa Hisabu
Niwa Hisabu
Application Number:
JP2004322566A
Publication Date:
November 17, 2010
Filing Date:
November 05, 2004
Export Citation:
Assignee:
CKD Corporation
International Classes:
H01L21/677; B65G49/06; B65G49/07; F16C32/06
Domestic Patent References:
| JP50066174A | ||||
| JP2002308424A | ||||
| JP52044177A |
Attorney, Agent or Firm:
Tsuyoshi Yamada