Title:
負イオン生成装置
Document Type and Number:
Japanese Patent JP7336863
Kind Code:
B2
Abstract:
To provide a negative ion generating apparatus in which a member constituting a plasma guide portion for guiding plasma can be protected.SOLUTION: In a negative ion generating apparatus 1, a gas supply unit 12 supplies gas as a raw material for negative ions into a chamber 10. A plasma generator 11 generates plasma P in the chamber 10, and a plasma guide unit 13 guides the plasma P. As a result, the plasma P spreads in the chamber 10. When the plasma generator 11 stops the generation of plasma P, negative ions are generated in the chamber 10. Here, in the plasma guide unit 13, a magnet 32 is arranged inside an anode 31. Therefore, the magnet 32 is protected from negative ions in the chamber 10 by the anode 31. Further, a plating layer 37 is formed on the surface of the anode 31 on the plasma generation portion 11 side. Therefore, the anode 31 is protected from negative ions in the chamber 10 by the plating layer 37.SELECTED DRAWING: Figure 2
Inventors:
Makoto Maehara
Toshiyuki Sakami
Naohisa Kitami
Toshiyuki Sakami
Naohisa Kitami
Application Number:
JP2019063359A
Publication Date:
September 01, 2023
Filing Date:
March 28, 2019
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
H01J27/18; H01J37/08; H01J37/317
Domestic Patent References:
| JP7006265U | ||||
| JP2017025407A | ||||
| JP7316796A | ||||
| JP2243761A | ||||
| JP1268869A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Yasuki Yanagi
Yuji Wada
Yoshiki Kuroki
Yasuki Yanagi
Yuji Wada