PURPOSE: To make it possible to use organic solvent for general purpose completely and economically as anhydrous washing liquid by a method wherein soiled components are separated and discharged from washing solvent in a distilling column system to concentrate and refine anhydrous organic solvent and, the organic solvent is recycled as washing solvent.
CONSTITUTION: As purge gas for an outlet and inlet port 31, inert gas is used and anhydrous organic solvent having lower boiling point than soiled component is used as washing solvent and there are provided a drying chamber 5, washing chamber 6, steam washing chamber 7, dipping cooling tank 11, transfer condenser 27, and condenser 8, and a shower nozzle 45, temperature control mechanism of washing liquid, mechanism for generating flow of the washing liquid, and cooling mechanism are provided in a dipping washing tank 9 of the chamber 7. And steam washing by the use of substantially anhydrous organic solvent vapor refined in a distilling column, dipping washing by the use of organic solvent, and shower washing can be performed and soiled components are separated and discharged from the washing solvent in the system to concentrate and refine anhydrous solvent so that the refined solvent is recycled as washing solvent.
URABE KAZUOKI
MIYOSHI SHOJI
ABE SHUNICHI
