Title:
【発明の名称】格子干渉型変位検出装置
Document Type and Number:
Japanese Patent JP3068407
Kind Code:
B2
Inventors:
Motohiro Osaki
Masaki Tomiya
Souichi Sato
Tetsuro Baba
Masaki Tomiya
Souichi Sato
Tetsuro Baba
Application Number:
JP13449694A
Publication Date:
July 24, 2000
Filing Date:
June 16, 1994
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01D5/38; G01B11/00; (IPC1-7): G01B11/00; G01D5/38
Domestic Patent References:
| JP2110319A | ||||
| JP2298816A | ||||
| JP5296722A |
Attorney, Agent or Firm:
Minoru Kinoshita (2 outside)