Title:
微細加工用工具および脆性材料の微細加工方法
Document Type and Number:
Japanese Patent JP5083276
Kind Code:
B2
Inventors:
Hiroshi Hayasaki
Application Number:
JP2009137251A
Publication Date:
November 28, 2012
Filing Date:
June 08, 2009
Export Citation:
Assignee:
Mitsubishi Materials Corporation
International Classes:
B23C5/10; B23C5/16; B24D3/00; B24D7/18; B28D1/14; B28D1/18
Domestic Patent References:
| JP8155947A | ||||
| JP4005367U | ||||
| JP2003205410A | ||||
| JP2000033573A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Yasuhiko Murayama
Noriko Yanai
Tadashi Takahashi
Yasuhiko Murayama
Noriko Yanai