MICROFABRICATED ELASTOMER VALVE AND PUMP SYSTEM

Title:

MICROFABRICATED ELASTOMER VALVE AND PUMP SYSTEM

Document Type and Number:

Japanese Patent JP2006315174

Kind Code:

A

Abstract:

To provide an elastomer valve structure constructed thin and operating with a minor force and to be fabricated easily compared with processing a silicon substrate, and also to provide a pumping system using the elastomer valve structure.

A first flow channel 30 and a second flow channel 32 laid thereon intersecting perpendicularly are formed in an elastomer block. A diaphragm 25 to form an apex of the first flow channel 30 separates the two flow channels from each other, and forms at the same time, the bottom of the second flow channel 32. The diaphragm 25 repeats the cycle of downward deflection and restitution with variation of the pressure in the second flow channel 32, and thereby the first flow channel 30 constitutes a valve operating system of linear motions.

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Inventors:

UNGER MARC A
CHOU HOU-PU
THORSEN TODD A
SCHERER AXEL
QUAKE STEPHEN R

Application Number:

JP2006178847A

Publication Date:

November 24, 2006

Filing Date:

June 28, 2006

Export Citation:

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Assignee:

CALIFORNIA INST OF TECHN

International Classes:

B81B3/00; G03F7/20; B01L3/00; B81B1/00; B81B7/00; B81C1/00; B81C3/00; B81C99/00; C12Q1/68; F04B17/00; F04B35/04; F04B43/04; F15C5/00; F16K7/00; F16K17/02; F16K99/00

Attorney, Agent or Firm:

Hidesaku Yamamoto

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