Title:
METHOD AND APPARATUS FOR REMOVING SUBSTANCES TO BE REMOVED IN FLUID
Document Type and Number:
Japanese Patent JP3291487
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce initial cost and running cost by catching and removing substances to be removed by using a filter consisting of at least partly of the substances to be removed contained in a fluid.
SOLUTION: A first filter film 10 of a filtration device for filtrating the wastewater (raw water) which is discharged from a dicing device or the like and in which the substances to be removed is mixed has countless filter pores 11. The substances 12 to be removed are stacked in layers on the exposed parts of the pores 11 and on the surface of the film 10 to form a film. The substances 12 are divided into two groups, substances 12A too large to pass through the pores 11 and small substances 12B which can pass through the pores 11. The large substances 12A are stacked on the film 10 to form a new layer, which is used as a second filter film 13. The substances 12B are caught and removed to purify the wastewater by making the wastewater pass through these filter films 10, 13. The filtrated water is discharged from below.
Inventors:
Motoyuki
Hirofumi Iinuma
Hirofumi Iinuma
Application Number:
JP32436799A
Publication Date:
June 10, 2002
Filing Date:
November 15, 1999
Export Citation:
Assignee:
Sanyo Electric Co., Ltd.
International Classes:
B24B55/12; B01D24/00; B01D25/164; B01D29/15; B01D36/02; B01D37/02; B01D61/14; B01D63/08; B01D65/02; B01D69/14; B01D71/26; C02F1/44; C02F9/00; H01L21/00; H01L21/304; C02F1/32; C02F1/52; (IPC1-7): C02F1/44; B01D61/14; B01D65/02; B24B55/12; H01L21/304
Domestic Patent References:
| JP1119672A | ||||
| JP200138351A | ||||
| JP1180205A |
Attorney, Agent or Firm:
Kei Okada (1 person outside)