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Title:
磁気軸受装置、およびそれを備える真空ポンプ
Document Type and Number:
Japanese Patent JP5229499
Kind Code:
B2
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Inventors:
Eijiro Misu
Application Number:
JP2009154690A
Publication Date:
July 03, 2013
Filing Date:
June 30, 2009
Export Citation:
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Assignee:
Yaskawa Electric Co., Ltd.
International Classes:
F16C32/04; F04D19/04; F16C17/24
Domestic Patent References:
JP2280646A
JP2002339970A
JP5099237A
JP64079415A



 
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