MACHINING METHOD AND OPTICAL PARTS

Title:

MACHINING METHOD AND OPTICAL PARTS

Document Type and Number:

Japanese Patent JP3526224

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide a machining method which is free from any reaction product consisting of a decomposed piece of a work and capable of obtaining a flat machined surface, and an optical parts using a machined surface by the machining method.
SOLUTION: The beam area S1 of a laser beam L2 on an organic insulation film 6 is set to be not less than a plan projected area S2 of a machining part 6a of the organic insulation film 6. Next, the organic insulation film 6 is moved in the direction of an irradiation area of the laser beam L2, and the irradiation of the laser beam L2 is stopped when an end part 6b of the machining part 6a is coincident with a movement end part L2a of the laser beam L2.

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Inventors:

Matsushima, Toshiyuki
Ishii, Yorishige
Okada, Noriaki
Fujita, Hideaki
Kurata, Yukio
Tamura, Hisahiro

Application Number:

JP29884998A

Publication Date:

May 10, 2004

Filing Date:

October 20, 1998

Export Citation:

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Assignee:

SHARP CORP

International Classes:

B23K26/08; B23K26/00; B23K26/066; B23K26/40; G02B6/122; G02B6/13; G02B6/132; G02B6/136; G02B6/138; G02B6/42; G02B6/36; (IPC1-7): B23K26/00; B23K26/06; B23K26/08; G02B6/122; G02B6/13

Attorney, Agent or Firm:

原謙三

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