Title:
液体の吐出方法
Document Type and Number:
Japanese Patent JP6866042
Kind Code:
B2
Abstract:
A dispensing valve apparatus with less fluctuation in the dispensing rate is provided. The dispensing valve apparatus is a dispensing valve apparatus that closes off a fluid by a valve member and a valve member seat making contact with each other and is characterized in that a section of the valve member seat making contact with the valve member is made of a material having a tensile elastic modulus of 2 GPa or greater. Alternatively, the dispensing valve apparatus is a dispensing valve apparatus that closes off the fluid by the valve member and the valve member seat making contact with each other and is characterized in that the section of the valve member seat making contact with the valve member is made of a material having a compressive elastic modulus of 2 GPa or greater.
Inventors:
Yuichi Hamada
Application Number:
JP2017185770A
Publication Date:
April 28, 2021
Filing Date:
September 27, 2017
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
F16K25/00; B05C11/10; F16K1/34
Domestic Patent References:
| JP2006007116A | ||||
| JP2015182043A | ||||
| JP2005081333A | ||||
| JP2017516039A |
Attorney, Agent or Firm:
Shigeki Orizaka