Title:
LATCHING TYPE HEAT-DRIVEN MICRO-RELAY ELEMENT
Document Type and Number:
Japanese Patent JP3050526
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an extremely small micro-relay capable of being integrated and having low contact resistance by changing the internal pressure of a storage chamber via a temperature difference, moving a conductive liquid metal in a channel, and closing or opening signal electrodes.
SOLUTION: Power is applied to the heater 12 of an active storage chamber 10 or the heater 42 of a passive storage chamber 40, the internal pressure of the storage chamber is changed by temperature, a liquid metal 50 is moved in a channel 20, and signal electrodes 34, 35 or 31, 32 are closed or opened. When power is selectively applied to the heater 12 or 42, the signal can be turned on or off. This latching heat-driven micro-relay element can be integrated in a silicon wafer bulk by the technique such as macro-burnishing, electroplating, and conductor process, and an extremely small micro-relay capable of being integrated and having small contact resistance can be obtained.
Inventors:
Bouyan Choi
Kyunho Park
John Hyun Lee
Hyun Jung You
Kyunho Park
John Hyun Lee
Hyun Jung You
Application Number:
JP16340196A
Publication Date:
June 12, 2000
Filing Date:
June 24, 1996
Export Citation:
Assignee:
Electronics and Telecommunications Research Institute
International Classes:
H01H61/00; B81B3/00; H01H29/00; H01H61/01; H01L43/00; H01H1/00; H01H29/28; H01H61/02; (IPC1-7): H01H61/00; H01H29/00; H01H61/01
Domestic Patent References:
| JP5812692B1 |
Other References:
【文献】米国特許266105(US,A)
【文献】米国特許3176101(US,A)
【文献】米国特許3102179(US,A)
【文献】米国特許3632941(US,A)
【文献】米国特許3176101(US,A)
【文献】米国特許3102179(US,A)
【文献】米国特許3632941(US,A)
Attorney, Agent or Firm:
Kazuko Tomita (1 outside)
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