Title:
イオン源と、それを備えた多種イオン生成装置
Document Type and Number:
Japanese Patent JP7300197
Kind Code:
B2
Abstract:
An ion source according to the present invention comprises: an electron source (101); an anode electrode (102) and a cathode electrode (103) for extracting a hollow electron beam (EB) from the electron source (101); a drift tube (105) surrounding a passage region (104) for the extracted hollow electron beam (EB); a repeller (106) for reversing the traveling direction of the hollow electron beam (EB) that has passed through the passage region (104) toward the electron source (101); and a gas supply means for supplying a source gas to the passage region (104), wherein the electron source (101), the anode electrode (102), the repeller (106), and the gas supply means are all located outside the drift tube (105).
Inventors:
Ken Katagiri
Takashi Wakui
Takashi Wakui
Application Number:
JP2021511364A
Publication Date:
June 29, 2023
Filing Date:
March 13, 2020
Export Citation:
Assignee:
National Institute for Quantum Science and Technology
International Classes:
H01J27/20; A61N5/10; G21K5/04; H01J37/08
Domestic Patent References:
| JP2168541A | ||||
| JP7169428A | ||||
| JP60240039A |
Attorney, Agent or Firm:
Sumio Tanai
Masato Iida
Kazuzumi Nishizawa
Masato Iida
Kazuzumi Nishizawa