Title:
【発明の名称】反応容器の各種反応ガス用ガス入口
Document Type and Number:
Japanese Patent JP2668258
Kind Code:
B2
Abstract:
A gas inlet for different reactant gases which flow into reaction vessels with high flow velocity. The cross sections of the gas inlet supply lines are substantially smaller than that of the reaction vessel. The gas inlet has a part with a conicoidal interior contour, the cross section of which is adapted to the cross section of the reaction vessel and which is arranged at one end of the reaction vessel through which flow occurs. The individual supply lines end at approximately the focal point of the part having the conicoidal interior contour. The gas exit openings of the supply lines are directed at the vertex of the part having the conicoidal interior contour.
Inventors:
Jurgensen Holger
Application Number:
JP50541588A
Publication Date:
October 27, 1997
Filing Date:
June 30, 1988
Export Citation:
Assignee:
Ixtron Gameb
International Classes:
B01F23/10; B01J4/00; B01J12/02; C07K14/18; C07K16/10; C12N7/00; C12Q1/70; C23C16/44; C23C16/455; C30B25/14; H01L21/205; A61K38/00; A61K39/00; (IPC1-7): B01J4/00; B01F3/02; B01J12/02; C23C16/44; C30B25/14; H01L21/205
Attorney, Agent or Firm:
Masayoshi Misawa