HIGH VACUUM VALVE

Japanese Patent JP3496059

B2

PROBLEM TO BE SOLVED: To even the deformation of a metal bellows so as to improve the durability by providing an adhesion preventing plate for covering a metal bellows, which air-tightly seals a space between a flow passage and a valve body driving unit, so as to prevent the adhesion of the reaction product generated in a process chamber to the metal bellows.
SOLUTION: A high vacuum valve has a pump port 5 connected to a vacuum pump 1, a chamber port 6 connected to a process chamber, and a valve body 16 for opening and closing a valve seat provided in a flow passage between these ports, and this valve body 16 is driven by a driving unit 4, and a space between the flow passage 7 and the valve body driving unit 4 is air-tightly sealed by a metal bellows. In this case, an adhesion preventing plate 22 is provided so as to prevent the adhesion of the reaction product generated in the process chamber to the metal bellows 21. This adhesion preventing plate 22 has a height for covering an opening surface of the chamber port 6, and a lower end thereof is fitted to the periphery of the valve body 16 so as to cover the periphery of the metal bellows 21.

WO/2014/056724	PISTON MEMBRANE PUMP
JPS5850364	EXPANSIBLE TUBE TYPE REFRACTORY VALVE
WO/2023/025771	CONTROL DEVICE FOR FILTER INSTALLATIONS

Tsuneo Ishigaki

JP31352395A

February 09, 2004

November 07, 1995

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SMC Corporation

F16K7/07; F16K25/04; F16K41/10; F16K51/00; (IPC1-7): F16K41/10; F16K51/00

JP2296087A
JP742872A
JP3107587U
JP584874U
JP5590868U
JP637673U

Hiroshi Hayashi (2 outside)

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