Title:
HIGH TEMPERATURE MICRO-MACHINED VALVE
Document Type and Number:
Japanese Patent JP2003156157
Kind Code:
A
Abstract:
To provide a micro-valve which is manufactured at high yielding.
The micro-valve has a seat substrate (15) having a discharge port (70) and an opening (40) and in the micro-valve, the discharge port (70) and the opening (40) are formed through the seat substrate (15). The seat substrate (15) has a valve seat (20) projected from a recessed part of the seat substrate (15) and a support projected from the recessed part (30). The micro- valve also has a diaphragm (10) disposed on the seat substrate (15) and capable of forming a seal with the valve seat (20).
Inventors:
WANG TAK KUI
SHENG PEISHENG
WHITE RICHARD P
SHENG PEISHENG
WHITE RICHARD P
Application Number:
JP2002231908A
Publication Date:
May 30, 2003
Filing Date:
August 08, 2002
Export Citation:
Assignee:
AGILENT TECHNOLOGIES INC
International Classes:
F15C5/00; F16K7/17; B81B3/00; F16K99/00; (IPC1-7): F16K7/17; B81B3/00
Attorney, Agent or Firm:
Kaoru Furuya (3 outside)