Title:
溝加工装置
Document Type and Number:
Japanese Patent JP4393780
Kind Code:
B2
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Inventors:
Akihito Yanoo
Application Number:
JP2003089949A
Publication Date:
January 06, 2010
Filing Date:
March 28, 2003
Export Citation:
Assignee:
Mitsubishi Materials Techno Co., Ltd.
International Classes:
B23C3/28; B23Q3/16; B24B37/20; B24B37/26; B26D3/06; B26D7/01; H01L21/304
Domestic Patent References:
| JP2000343312A | ||||
| JP1295730A | ||||
| JP2002011630A | ||||
| JP6190620A | ||||
| JP2002001650A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama