Title:
イオン注入のための箔シートアセンブリ
Document Type and Number:
Japanese Patent JP7313422
Kind Code:
B2
Abstract:
A foil liner comprising a plurality of foil layers is disclosed. The foil layers may each be an electrically conductive material that are stacked on top of each other. The spacing between adjacent foil layers may create a thermal gradient such that the temperature of the plasma is hotter than the temperature of the ion source chamber. In other embodiments, the foil layers may be assembly to sink the heat from the plasma so that the plasma is cooler than the temperature of the ion source chamber. In some embodiments, gaps or protrusions are disposed on one or more of the foil layers to affect the thermal gradient. In certain embodiments, one or more of the foil layers may be constructed of an insulating material to further affect the thermal gradient. The foil liner may be easily assembled, installed and replaced from within the ion source chamber.
Inventors:
Chaney, Craig Earl
McLaughlin, Adam M.
Sargent, James A.
Abeshaus, Joshua M.
McLaughlin, Adam M.
Sargent, James A.
Abeshaus, Joshua M.
Application Number:
JP2021502694A
Publication Date:
July 24, 2023
Filing Date:
February 21, 2019
Export Citation:
Assignee:
Varian Semiconductor Equipment Associates, Inc.
International Classes:
H01J27/08; H01J27/04; H01J37/08; H01J37/317
Domestic Patent References:
| JP3077354U | ||||
| JP2012518267A | ||||
| JP2005210140A | ||||
| JP2015204185A | ||||
| JP2013211232A | ||||
| JP2014139889A | ||||
| JP2014044886A |
Foreign References:
| KR1020070007621A | ||||
| US20170221669 |
Attorney, Agent or Firm:
Sonoda & Kobayashi Patent Attorneys Corporation
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