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Patent Searching and Data


Title:
FLOW CONTROL DEVICE AND FLOW CONTROL SYSTEM
Document Type and Number:
Japanese Patent JP2013161418
Kind Code:
A
Abstract:

To provide a flow control device and a flow control system capable of reducing a load on an actuator driving a valve.

A flow control device 18 includes: a valve body 20 in which a first flow channel 21, a valve chamber 22, a second flow channel 23, and a valve seat portion 24 are provided; a diaphragm 42 that lays out an inside and an outside of the valve chamber 22; and a valve body 41 that is connected to the diaphragm 42 and is provided opposed to the valve seat portion 24. The flow control device 18 includes: a piston rod 60 that is connected to the valve body 41; a stepping motor 90 that reciprocally drives the piston rod 60 so as to change a distance between the valve seat portion 24 and the valve body 41; and a pressurizing/depressurizing unit 12 that exerts a static load in a reciprocal driving direction on the piston rod 60.


Inventors:
YOSHIYASU KAZUTOMO
Application Number:
JP2012025112A
Publication Date:
August 19, 2013
Filing Date:
February 08, 2012
Export Citation:
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Assignee:
CKD CORP
International Classes:
G05D7/06; F16K31/04; F16K41/10
Domestic Patent References:
JPH05324093A1993-12-07
JP2005351308A2005-12-22
JP3168588U2011-06-16
JP2003083466A2003-03-19
Attorney, Agent or Firm:
Tsuyoshi Yamada
Hiroshi Matsuda