Title:
下段部材の固定装置およびこれを備えた流体制御装置
Document Type and Number:
Japanese Patent JP5775718
Kind Code:
B2
Abstract:
Provided are a fixing device for a lower-stage member which facilitates a leveling operation for making upper surfaces of lower-stage members coplanar, and can further enhance a vibration absorbing effect generated by an elastic member, and a fluid control device which includes the fixing device. A fixing device for a lower-stage member is configured such that respective lower-stage members (2) are fixed once and, thereafter, a desired lower-stage member (2) is moved upwardly against an elastic force (21) so as to finely adjust positions of upper surfaces of a plurality of lower-stage members (2). The elastic member (21) is formed of an annular body made of rubber or a synthetic resin. A cutout (21a, 21b) which imparts the elastic deformation by bending when a force in the vertical direction is applied to the elastic member (21) is formed on an upper portion and a lower portion of an inner peripheral surface of the elastic member (21).
Inventors:
Tsutomu Shinohara
Takahiro Matsuda
Tomohiro Nakata
Michio Yamaji
Takahiro Matsuda
Tomohiro Nakata
Michio Yamaji
Application Number:
JP2011069620A
Publication Date:
September 09, 2015
Filing Date:
March 28, 2011
Export Citation:
Assignee:
Fujikin Co., Ltd.
International Classes:
F16B39/24; F16K27/00; F16L39/00
Domestic Patent References:
| JP2000145979A | ||||
| JP2001289231A |
Foreign References:
| WO2006100841A1 |
Attorney, Agent or Firm:
Norihiko Hibi
Einosuke Kishimoto
Akira Watanabe
Matsumura Naoto
Einosuke Kishimoto
Akira Watanabe
Matsumura Naoto