Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
FILM-FORMING APPARATUS AND FILM-FORMING METHOD
Document Type and Number:
Japanese Patent JP2008174793
Kind Code:
A
Abstract:

To provide a film-forming apparatus and a film-forming method, capable of evenly forming a DLC (diamond-like carbon) film on the inner surface of a hollow body being a film-forming object.

The film-forming apparatus is provided with a pressure reducing means for reducing the pressure in a chamber, a raw material gas supply means for supplying a raw material gas into the hollow body, an electrode forming a space surrounding the hollow body for changing the raw material gas in the hollow body into plasma state by a discharge generated in the space, a magnetic field generating means arranged outside the electrode for generating a magnetic field in the space surrounding the hollow body; and the diamond-like carbon film with uniform film thickness is formed on the inner surface of the hollow body with the raw material gas in the plasma state by using the magnetic field generated by the magnetic field generating means.


Inventors:
NAKAMORI HIDEKI
Application Number:
JP2007009046A
Publication Date:
July 31, 2008
Filing Date:
January 18, 2007
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
NANOTEC CORP
International Classes:
C23C16/27; B65D23/02; B65D25/14; C23C16/505
Domestic Patent References:
JPH0831748A1996-02-02
JP2000185997A2000-07-04
JP2002212728A2002-07-31
JP2004300536A2004-10-28
JP2005233960A2005-09-02
JPH0270059A1990-03-08
Attorney, Agent or Firm:
Katsushige Yamada
Katsumi Yamada
Hiroshige Yamada
Tomoshige Yamada



 
Previous Patent: HYDROPHILIZING MODIFICATION METHOD FOR FLUORINE BASE SYNTHETIC RESIN, AND ARTICLE OBTAINED THEREBY

Next Patent: PRETREATMENT METHOD TO PLATING FOR PRINTED CIRCUIT BOARD