To provide an exhaust gas treating method capable of preventing blocking of a pipe due to deposit adhering, an original purpose, preventing the pipe from being excessively heated, and preventing thinning and blocking of the pipe due to a reaction product by the pipe material and fluorine radicals, when introducing exhaust gas from a membrane forming system containing Si components, into an exhaust gas treating process.
In this exhaust gas treating method treating exhaust gas from a membrane forming system containing Si components, by the exhaust gas treating process 105, when introducing the exhaust gas into the exhaust gas treating process 105 through a pipe 103 by a vacuum pump 102, a check valve 104 is provided in the pipe 103, the pipe 103 is, at least between the vacuum pump 102 and exhaust gas treating process 105, is kept at a temperature preventing deposition of deposit from the exhaust gas by a heater 109, a heating means, and a heating temperature of the heater 109 is set to 130-180°C.
COPYRIGHT: (C)2006,JPO&NCIPI
| JPS52155182 | DECONTAMINATION OF EXHAUST GAS |
Akinori Yamada
Yoshito Masuda
Tokuda Takahiro
Hiroyuki Miyamoto
| JP2003021315A | ||||
| JP5192534A | ||||
| JP2102194A | ||||
| JP11057390A |