Title:
EXCIMER LAMP AND LIGHT IRRADIATION DEVICE
Document Type and Number:
Japanese Patent JP2021118066
Kind Code:
A
Abstract:
To provide an excimer lamp easy for installation and exchange work.SOLUTION: The excimer lamp includes: a luminous tube having a first outer wall surface and a second outer wall surface extending in a first direction to face each other in a second direction different from the first direction, and having light-emitting gas encapsulated inside; a pair of electrodes provided on the first and second outer wall surfaces; a pair of electric conduction parts arranged on each end part side of the first outer wall in the first direction and each connected to each different electrode; a pair of power supply pins each connected to each different electric conduction part, and arranged to extend to the opposite side of the second outer wall surface in the second direction; and a pair of bases having a through hole formed along the second direction and having a power supply pin support part with the power supply pin inserted inside, to fix the luminous tube and the power supply pin.SELECTED DRAWING: Figure 2A
Inventors:
YAMAGUCHI MASASHI
TAKEZOE NORITAKA
OZU MASATO
ARIKAWA KAZUKI
TAKEZOE NORITAKA
OZU MASATO
ARIKAWA KAZUKI
Application Number:
JP2020009608A
Publication Date:
August 10, 2021
Filing Date:
January 24, 2020
Export Citation:
Assignee:
USHIO ELECTRIC INC
International Classes:
H01J65/00; A61L2/20; B01J19/12; G03F7/20; H01J5/50; H01L21/304
Attorney, Agent or Firm:
Patent Business Corporation Unias International Patent Office