Title:
推定器および真空バルブ
Document Type and Number:
Japanese Patent JP7306300
Kind Code:
B2
Abstract:
An estimator comprises: an acquisitor to acquire a plurality of data pairs each containing a valve body opening of the vacuum valve and the chamber pressure at the valve body opening; and an operator to operate the gas species characteristic value and the first chamber volume estimation value, based on an exhaust's expression representing a relationship among the second effective exhaust rate, a flow rate of a gas introduced into the vacuum chamber, a chamber volume, and a chamber pressure, the plurality of data pairs acquired in the acquisitor, and correlation data between the valve body opening and the second effective exhaust rate about the predetermined known gas.
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Inventors:
Junichiro Kozaki
Application Number:
JP2020044344A
Publication Date:
July 11, 2023
Filing Date:
March 13, 2020
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
H01L21/3065; F16K51/02
Domestic Patent References:
| JP2018112932A | ||||
| JP2019165117A | ||||
| JP202024638A | ||||
| JP5087073B2 |
Attorney, Agent or Firm:
Takuji Yamashita