Title:
電気的に駆動される一体型マイクロバルブ
Document Type and Number:
Japanese Patent JP4143984
Kind Code:
B2
Abstract:
A genus of integrated valves having an integrated actuator with a thin, flexible membrane formed of silicon driven by pressure of a fluid trapped in a cavity formed by bonding a first and second die. The cavity has a resistor formed therein through which current is driven to cause the pressure to rise and the flexible membrane to flex. Movement of membrane is used to drive a valve element to a position where it unblocks a port to open the valve. This genus includes species such as ultra clean embodiments where a containment barrier keeps ultra clean processing gases confined to a wetted area having materials and bonding agents selected so as to be chemically compatible with the materials and conditions in the wetted area. Low leak species include a compliant material for a valve seat which is deformed by a ridge surrounding a port in the closed position. It is this port which is blocked and unblocked by movement of the valve element to close and open the valve.
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Inventors:
Harris, James, M.
Cozad, Bradford, A.
Hopkins, Dean, Allin, Junior
Fitch, John, S.
Cozad, Bradford, A.
Hopkins, Dean, Allin, Junior
Fitch, John, S.
Application Number:
JP51580398A
Publication Date:
September 03, 2008
Filing Date:
September 25, 1997
Export Citation:
Assignee:
SMC Corporation
International Classes:
B81B3/00; F15C3/04; F15C5/00; F16K31/02; F16K31/68; F16K99/00
Domestic Patent References:
| JP63067114B1 | ||||
| JP4506105A | ||||
| JP7508085A | ||||
| JP5000619Y2 | ||||
| JP5240371A | ||||
| JP7248061A | ||||
| JP1283487A | ||||
| JP4501303A | ||||
| JP3401788B2 |
Foreign References:
| DE4422971A1 |
Attorney, Agent or Firm:
Takehiro Chiba