Title:
ELECTRICAL SIGNAL DISPLACEMENT CONVERTOR, EQUIPMENT USING THE SAME AND DRIVE METHOD OF FLUID CONVEYING APPARATUS USING THE SAME
Document Type and Number:
Japanese Patent JP3042333
Kind Code:
B2
Abstract:
PURPOSE: To enable the making of smaller and lighter sensors and actuators with a novel structure by providing a working part with a part adapted to be displaced parallel.
CONSTITUTION: A strip-shaped working part 2 is mounted on a frame part 1 having an opening 3 and both ends of the working part 2 are fixed on a frame 2 to make fixed parts 6. The working part 2 has electrode layers 5a and 5b formed on both upper and lower surfaces of a strain gauge layer 4. When an electrical signal is applied between the electrode layers 5a and 5b, an elongated lateral distortion is generated in the strain gauge layer 4 and hence, the working part 2 with both ends thereof fixed is buckled and displaced across the thickness thereof. By the contrary, when an external force acts on the working part 2, an electrical signal is generated in the strain gauge layer 4.
Inventors:
Minoru Sakata
Masaaki Ikeda
Hiroshi Goto
Shuichi Wakabayashi
Masaaki Ikeda
Hiroshi Goto
Shuichi Wakabayashi
Application Number:
JP28009494A
Publication Date:
May 15, 2000
Filing Date:
October 18, 1994
Export Citation:
Assignee:
Omron Corporation
International Classes:
B41J2/045; B41J2/055; B81B3/00; G01B7/16; G01D5/18; G01D21/00; G01K7/00; G01L1/16; G01P15/09; G02B26/10; H01H57/00; H01L29/84; H01L41/09; H02N2/00; (IPC1-7): G01B7/16; B41J2/045; B41J2/055; G01D5/18; G01D21/00; G01K7/00; G01L1/16; G01P15/09; H01L29/84; H01L41/09; H02N2/00
Domestic Patent References:
| JP5231815A |
Attorney, Agent or Firm:
Masafusa Nakano