Title:
駆動装置
Document Type and Number:
Japanese Patent JP7070657
Kind Code:
B2
Abstract:
A movable-side magnet is provided to a movable portion in a vacuum chamber. A drive unit is provided outside the vacuum chamber, and drives the movable portion by exerting magnetic force on the movable-side magnet. The drive unit has a first magnet, a second magnet, and a moving mechanism (moving member). The first magnet exerts magnetic force of attracting the movable-side magnet. The second magnet is provided to be adjacent to the first magnet, and exerts magnetic force of repelling the movable-side magnet. The moving mechanism integrally moves the first magnet and the second magnet.
Inventors:
Masatoshi Furuta
Kei Kodera
Kiyoshi Watanabe
Kei Kodera
Kiyoshi Watanabe
Application Number:
JP2020504789A
Publication Date:
May 18, 2022
Filing Date:
December 04, 2018
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
F16H49/00
Domestic Patent References:
| JP489717A | ||||
| JP194884A | ||||
| JP20174787A | ||||
| JP3100886B2 | ||||
| JP7332433A | ||||
| JP5760626B2 |
Attorney, Agent or Firm:
Yoshimoto power
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