Title:
希釈液製造装置および希釈液製造方法
Document Type and Number:
Japanese Patent JP6777534
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To continuously and stably manufacture a diluent adjusted to a predetermined concentration in a wide concentration range.SOLUTION: A diluent manufacturing apparatus 10 has: a first tube 11 supplying a first liquid; a tank 12a storing a second liquid; a plurality of second tubes 13 which connect the tank 12a with the first tube 11 and are connected to each other in parallel; a pressure adjustment section 18 which adjusts a pressure in the tank 12a, pressure-feeds the second liquid in the tank 12a through at least one of the plurality of second tubes 13, and supplies the second liquid to the first tube 11; and a control section 20 which adjusts an addition amount of the second liquid to the first liquid by the pressure adjustment section 18 so that the concentration of the diluent becomes predetermined concentration on the basis of measurement values of a flow rate of the first liquid flowing through the first tube 11 or the diluent and concentration of the diluent, where at least one of the inner diameters and the lengths of the plurality of second tubes 13 are different from each other.SELECTED DRAWING: Figure 2
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Inventors:
Yamashita happiness
Application Number:
JP2016254939A
Publication Date:
October 28, 2020
Filing Date:
December 28, 2016
Export Citation:
Assignee:
Organo Corporation
International Classes:
B01F5/00; B01F1/00; B01F3/08; B01F15/04; H01L21/304
Domestic Patent References:
| JP2018103146A | ||||
| JP11070328A | ||||
| JP2015158399A | ||||
| JP10263379A | ||||
| JP2005175183A |
Foreign References:
| WO2016042933A1 |
Attorney, Agent or Firm:
Akio Miyazaki
Masaaki Ogata
Masaaki Ogata