Title:
DEMAGNETIZATION DEVICE, DRAWING DEVICE, AND METHOD OF MANUFACTURING ARTICLE
Document Type and Number:
Japanese Patent JP2015072953
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a technique advantageous to demagnetize an object.SOLUTION: A demagnetization device for demagnetizing an object includes a coil for generating a magnetic field to demagnetize the object and a supply unit for supplying an AC current having an amplitude reduced with time, to the coil. The supply unit makes the amplitude of the AC current larger than an absolute value of a current value with which the object is magnetically saturated, in a first period T, makes an absolute value of a change rate of the amplitude of the AC current larger than that in the first period in a second period Tsubsequent to the first period, and makes the amplitude of the AC current smaller than an absolute value of a current value corresponding to a coercive force of the object and makes the absolute value of the change rate of the amplitude of the AC current smaller than that in the second period in a third period Tsubsequent to the second period.
Inventors:
UCHIDA SHINJI
Application Number:
JP2013206806A
Publication Date:
April 16, 2015
Filing Date:
October 01, 2013
Export Citation:
Assignee:
CANON KK
International Classes:
H01F13/00; H01L21/027
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu