Title:
真空室用の閉鎖またはエアロック装置
Document Type and Number:
Japanese Patent JP6431096
Kind Code:
B2
Abstract:
The present invention relates to a closure or airlock device for a vacuum chamber (12) having: - a counterplate (16) which can be arranged on a vacuum chamber (12) and encloses an opening (14) of the vacuum chamber (12), - a closure cover (18) which is mounted so as to be able to move relative to the counterplate (16) and which, in a closed position (28) on the counterplate (16), closes the opening (14), - at least one controllable magnet device (30), in engagement with the counterplate (16) and the closure cover (18), for generating a closure force (S) acting between the counterplate (16) and the closure cover (18), and - at least one separation measuring device (40) for measuring a separation (41) between the closure cover (18) and the counterplate (16), - wherein the magnet device (30) can be controlled in dependence on the separation (41), measured by the separation measuring device (40), between the counterplate (16) and the closure cover (18).
Inventors:
Ulrich Oldendorf
Christoph Kresen
Christoph Kresen
Application Number:
JP2016572449A
Publication Date:
November 28, 2018
Filing Date:
June 10, 2015
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
F16J13/02; F16C32/04; F16K31/06; F16K37/00
Domestic Patent References:
| JP52081620A | ||||
| JP7190228A | ||||
| JP2000005060A |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation