Title:
洗浄システムおよび洗浄方法
Document Type and Number:
Japanese Patent JP5133438
Kind Code:
B2
Inventors:
Kazuya Tamura
Akira Suzuki
Akira Suzuki
Application Number:
JP2011066934A
Publication Date:
January 30, 2013
Filing Date:
March 25, 2011
Export Citation:
Assignee:
Dai-Dan Co., Ltd.
National Institute of Advanced Industrial Science and Technology
National Institute of Advanced Industrial Science and Technology
International Classes:
B01D41/04; B01J3/00; B01J3/02; B08B7/00
Domestic Patent References:
| JP2007330841A |
Attorney, Agent or Firm:
Yoshitaka Kobayashi