Title:
CHEMICAL SOLUTION SUPPLYING APPARATUS
Document Type and Number:
Japanese Patent JP3717996
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To keep liquid level of a chemical solution in a nozzle at a constant position after application of the chemical solution through the nozzle has been finished.
SOLUTION: A nozzle 2 is connected to a container 1 containing a chemical solution (L) via a pipe 3 and the chemical solution (L) in the container 1 is supplied to the nozzle 2 by means of a pump 4. After a specified amount of the chemical solution (L) has been applied to a matter to be coated (W) through the nozzle 2, a sucking-back valve 7 is operated to return the chemical solution into the nozzle 2. Level of the chemical solution (L) returned to the interior of the nozzle 2 by sucking-back operation is detected by a liquid level sensor 12, and the sucking-back operation is finished when the liquid level sensor 12 is turned on. Thus, the chemical solution is returned into the nozzle 2 in such a manner that the level of the chemical solution always comes to a specified liquid level at the time of finishing the sucking-back operation.
Inventors:
Takeshi Yajima
Application Number:
JP12304896A
Publication Date:
November 16, 2005
Filing Date:
May 17, 1996
Export Citation:
Assignee:
Koganei Co., Ltd.
International Classes:
F16K21/16; B05C5/00; B05C11/10; F04B53/10; F16K21/18; F16K23/00; F16K37/00; H01L21/312; (IPC1-7): B05C11/10; B05C5/00; F04B53/10; F16K21/16; F16K21/18; F16K23/00; F16K37/00
Domestic Patent References:
| JP4158510A | ||||
| JP5082431A | ||||
| JP2115066A | ||||
| JP64021924A | ||||
| JP7027150U | ||||
| JP3114565A |
Attorney, Agent or Firm:
Yamato Tsutsui
Yoshitaka Kozuka
Toshiro Ohata
Yoshitaka Kozuka
Toshiro Ohata