PURPOSE: To stick base plates together with a high precision in thickness at low cost by eliminating irregular pressure to the base plates and enabling the sticking processing in a short time.
CONSTITUTION: In between a lower thin film sheet 19 and an upper thin film sheet 24, a base plate 18 to be stuck is inserted. A support frame 23 which is supporting the upper thin film sheet 24 is lowered. Pressure in a sealed space between the upper and lower thin film sheets is reduced by a vacuum device 15. A heat medium 7 in a tank 2 is heated, and the base plate 18 is preheated by its steam, dipped in the heat medium 7, and heated for primary heating. Thereafter, it is cooled by a cooling medium at the upper part in the tank 2. As the sticking base plate 18 is heated and pressed in the liquid, a uniform sticking face pressure is generated on the base plate 18, so that a base plate having high precision between finished layers and high grade can be produced at low cost.
SANKAI HARUO
SATO HAJIME
