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Title:
APPARATUS FOR CRYSTAL PULLING
Document Type and Number:
Japanese Patent JPH05229890
Kind Code:
A
Abstract:

PURPOSE: To prevent a seal member from burning by releasing the seal member of a closed body from shearing stress in closing operation and additionally protecting the radiation of crystal at a high temperature during pulling operation at an apparatus for pulling crystal.

CONSTITUTION: The seal member is constituted as a gasket 9 to be burdened mainly by pressure without shearing stress and friction and the seal member is protected from the heat radiation of the crystal at a high temperature by a guard 15 during the pulling of the crystal. Thereby, the using life of the gasket 9 is prolonged without requiring a cost for technique and as an operating period is kept longer as the result to economically prepare the crystal to be pulled compared with conventional technique.


Inventors:
DEIITAA DORETSUHIZERU
Application Number:
JP17530592A
Publication Date:
September 07, 1993
Filing Date:
July 02, 1992
Export Citation:
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Assignee:
LEYBOLD AG
International Classes:
C30B15/00; F16K39/00; H01L21/208; (IPC1-7): C30B15/00; F16K39/00; H01L21/208
Attorney, Agent or Firm:
Toshio Yano (2 outside)



 
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