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Title:
除振装置
Document Type and Number:
Japanese Patent JP5103549
Kind Code:
B2
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Inventors:
Shigeru Matsumoto
Hiroshi Miyashita
Kazuhiro Murauchi
Application Number:
JP2011501645A
Publication Date:
December 19, 2012
Filing Date:
February 25, 2010
Export Citation:
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Assignee:
International Measuring Instruments Co., Ltd.
International Classes:
F16F15/02; F16H25/20; F16H49/00; G01P3/52; H01L21/027
Domestic Patent References:
JP2002340082A2002-11-27
JP2001090773A2001-04-03
JPH08326705A1996-12-10
JPH1178829A1999-03-23
JPH0925987A1997-01-28
JPH10116104A1998-05-06
Attorney, Agent or Firm:
Shuhei Matsuoka
Yoshiyuki Araki
Eihiro Oyama



 
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