Title:
ANTI-VIBRATION DEVICE FOR PRECISION APPARATUS
Document Type and Number:
Japanese Patent JP2021131157
Kind Code:
A
Abstract:
To provide an anti-vibration device for a precision apparatus which prevents vibration of a vibration generating source from being transmitted to a precision apparatus.SOLUTION: An anti-vibration device 10 for a precision apparatus includes: a cup shaped case 13 including a closing end part 14 attached to one of a precision apparatus 11 and a base 12 and an opening end part 16 opening to the other member; a connection head part 18 which is attached to the other member of the precision apparatus 11 and the base 12 and disposed in the opening end part 16; an anti-vibration member 41 disposed between the connection head part 18 and the case 13; and a spiral spring 31 in which an inner periphery part engages with an inner periphery side engagement part 21 formed at the connection head part 18 and an outer periphery part engages with an outer periphery side engagement part 25 formed at the opening end part 16. The anti-vibration device 10 for the precision apparatus is disposed between the precision apparatus 11 and the base 12 and absorbs vibration transmitted from the base 12 to the precision apparatus 11.SELECTED DRAWING: Figure 1
Inventors:
KUZUKAWA MITSUO
KOBAYASHI NORIYUKI
KOBAYASHI NORIYUKI
Application Number:
JP2021023969A
Publication Date:
September 09, 2021
Filing Date:
February 18, 2021
Export Citation:
Assignee:
FUKOKU KK
International Classes:
F16F15/04; F16F1/10; F16F1/37; F16F1/376; F16F3/02; F16F15/067; G03B17/56
Attorney, Agent or Firm:
Tsutsui International Patent Office