Title:
AIR SUPPLY DEVICE FOR VACUUM PUMP USING MAGNETIC BEARING
Document Type and Number:
Japanese Patent JP3722874
Kind Code:
B2
Abstract:
PURPOSE: To improve an air supply device for a vacuum pump which has a high speed rotor and which uses a magnetic bearing, without increasing the manufacturing cost.
CONSTITUTION: In an air supply device for a vacuum pump which has a high speed rotor and which uses a magnetic bearing, a gap between a thrust bearing- axial support disc 20 and a thrust bearing-axial magnet 21 is reduced to increase the load carrying capacity of the magnetic thrust bearing in the course of air- supplying process, and thus to carry a large load caused by the execution of the air supply process. During normal operation, the gap is adjusted to an upper limit value.
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Inventors:
Helmut Bernhard
Rene Ralsonur
Rene Ralsonur
Application Number:
JP16394495A
Publication Date:
November 30, 2005
Filing Date:
June 29, 1995
Export Citation:
Assignee:
Pfeiffer Vacuum Game Behr
International Classes:
F04D19/04; F04D29/04; F16C32/04; F16C39/06; (IPC1-7): F04D19/04; F16C32/04
Domestic Patent References:
| JP536093U | ||||
| JP4339197A |
Attorney, Agent or Firm:
Kazuo Shamoto
Shosuke Imai
Tadashi Masui
Tadahiko Kurita
Yasushi Kobayashi
Akio Chiba
Shosuke Imai
Tadashi Masui
Tadahiko Kurita
Yasushi Kobayashi
Akio Chiba
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