Document Type and Number:
Japanese Patent JPS63178364
Kind Code:
U
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Application Number:
JP7032387U
Publication Date:
November 18, 1988
Filing Date:
May 12, 1987
Export Citation:
International Classes:
H01L41/09; H01H57/00; H01L41/08; (IPC1-7): H01L41/08; H01H57/00