Document Type and Number:
Japanese Patent JPH0366592
Kind Code:
U
Application Number:
JP12631089U
Publication Date:
June 27, 1991
Filing Date:
October 27, 1989
Export Citation:
International Classes:
F15B7/00; H01L41/08; H01L41/083; H01L41/09; H02N2/00; (IPC1-7): H02N2/00; H01L41/08; F15B7/00; H01L41/09
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