Document Type and Number:
Japanese Patent JPH0341401
Kind Code:
Y2
Application Number:
JP2267585U
Publication Date:
August 30, 1991
Filing Date:
February 21, 1985
Export Citation:
International Classes:
G01T1/18; H01J47/06; (IPC1-7): H01J47/06; G01T1/18
Next Patent: JPH0341402