Title:
高周波電源装置
Document Type and Number:
Japanese Patent JP7476815
Kind Code:
B2
Abstract:
Provided is a high-frequency power supply device capable of causing an appropriate current to flow through a transformer. A self-oscillation high-frequency power supply device is provided with a DC power supply, an LC resonant circuit, a switching circuit, and a transformer. The LC resonant circuit includes an induction coil for plasma generation and a capacitor. The switching circuit includes a semiconductor element, the switching circuit being configured to subject DC power supplied from the DC power supply to switching processing to supply high-frequency power to the LC resonant circuit. The transformer includes a primary coil included in the LC resonant circuit and a secondary coil connected to the semiconductor element to turn on/off a semiconductor element. The transformer has a coaxial structure in which the primary coil and the secondary coil are coaxially provided. The LC resonant circuit includes a resistor connected in parallel to the primary coil.
Inventors:
Naoki Yasuda
Application Number:
JP2021011930A
Publication Date:
May 01, 2024
Filing Date:
January 28, 2021
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
H02M7/48; H01F30/08; H01F30/10
Domestic Patent References:
| JP2016051556A | ||||
| JP48073057A | ||||
| JP51109714A | ||||
| JP4322108A | ||||
| JP2015023720A |
Foreign References:
| US20190036439 |
Attorney, Agent or Firm:
Riki Yoshimoto